This subject will expose the students to the development of MEMS (microelectromechanical systems) starting from smart sensors with sensing elements and signal conditioning interface as the data acquisition part to the use of microcontrollers as the processing and analysis part which are connected to radio transceivers that act as the data distribution part. With single chip micromachining and microfabrication techniques, miniaturization is achieved for possible wireless adhoc networking between the microsensors that can be connected to a higher-level controller for further processing. Applications include telecommunications (public or military), medical, biotechnology, automotive, oil and gas, energy industry, building automation etc.